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originally published November 2001
この文書は，シリコンの
SEMI E133-0524 (technical revision)
本スタンダードは，global Gases Committeeで技術的に承認されている。現版は2009年9月4日，global Audits and Reviews Subcommitteeにて発行が承認された。2009年10月にwww
D04000 - SEMI D40 - FPD基板の「たわみ」に関する用語 StdVol-Process Chemicals originally published November 2001NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Flat Panel Display Factory Automation Global Technical CommitteeJapanese Flat Panel Display Factory Automation Committee2004430Japanese Regional Standards Committee20046www. semi. org20047 FPD FPD Referenced SEMI Standards SEMI D9