C08700 - SEMI C87 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Contact Profilometry StdPbc-0312 With this publication

With this publication

It has been replaced by SEMI F117

In neither case shall the gas be considered as of higher quality than that defined by the specification

The guide may also be used for large particles not covered by existing particle-detection metrology

C08700 - SEMI C87 - Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Contact Profilometry StdPbc-0312 With this publicationThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on January 5, 2015. Available at www. semiviews. org and www. semi. org in May 2015. This Document provides a test method for determining the roughness of polymer surfaces using contact profilometry (CP). In microelectronics, the need to accurately determine roughness of