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Collect and report Person and skill performance (utilization and effectiveness)
Terminology (§ 5)
SEMI F13 — Guide for Gas Source Control Equipment
SEMI MF576-0812 (technical revision)
G07900 - SEMI G79 - Specification for Overall Digital Timing Accuracy Revision:SEMI G79-0200 - Inactive Collect and report Person andThis Standard was technically approved by the global Automated Test Equipment Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in May 2012; originally published February 2000. This Standard is intended to provide a minimum common definition of timing accuracy specifications for semiconductor automatic test equipment